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  • RFS-1310L Product Pictures
  • RFS-1310L Product Pictures
  • RFS-1310L Product Pictures

RFS-1310L RFS series DC/RF power supply for plasma processes, voltage range 0-1300V DC or 0-5A, and 13.56MHz RF output. 100% fully tested, working condition. Suitable for sputtering, etching, plasma enhanced chemical vapor deposition (PECVD), and surface treatment in semiconductor and thin film manufacturing.

  • Product Name:Ulvac RFS-1310L 1kW 13.56MHz DC/RF Power Supply for Plasma Processes
  • Brand: Ulvac
  • Packing:Box
  • Package:Standard
  • SPQ:
  • Channel:Self-Support
  • MOQ:1
Unit Price: $ 1440
Total: $ 1440
Order Quantity:
- +
Stock:13
For details, please consult: ben   +86-755-8363-6065   Or Submit Inquiry

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  • Technical Parameter
Type: Multi-mode (DC/RF) Power Supply; Models: RFS-1310L (DC/RF), RFS-1310N (RF only); DC output (L variant): Voltage 0-1300V, Current 0-1A; Regulation (DC) voltage: ±0.03%, current: ±0.15%; RF output: 13.56MHz, power rating 1kW; AC input: 100-240V single-phase, 50/60Hz; Communication: RS-232/485 or fieldbus; Efficiency: >92%; Features: Constant voltage and constant current modes, compact and lightweight design; Status: Commercialized
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  • Commodity Description
RFS series DC/RF power supply for plasma processes, voltage range 0-1300V DC or 0-5A, and 13.56MHz RF output. Applications: sputtering, etching, plasma enhanced chemical vapor deposition (PECVD), and surface treatment in semiconductor and thin film manufacturing.
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Is the product quality guaranteed?

LEI LI ELECTRONICS CO., LTD. specializes in industrial automation components, including both new and used/refurbished parts. All products undergo professional inspection and functional testing before shipment to ensure they meet operational standards.

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New parts: Eligible for return within the period specified in the product listing, subject to terms and conditions.

Used/refurbished parts: Sold as-is, with returns only accepted if verified defects are found upon receipt.

Please confirm the specific terms with our customer service before placing an order.

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Our pricing is based on product condition (new/used), availability, and market standards. We strive to offer competitive pricing while maintaining reliable quality.

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Orders with in-stock items are typically shipped within 1–2 business days. Our default shipping service is a reliable cross-border courier partner. We can also arrange alternative shipping solutions based on your requirements. A tracking number will be provided once your order is dispatched.

Can you help with bulk or BOM-based purchasing?

Yes, we offer one-stop BOM kitting services for industrial automation projects. Simply provide your parts list to our customer service team, and we will assist you with sourcing available components.

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